If you are initiating the shutter manually, it is quite possible that the camera has become very slightly loose at the F-mount. So, when you press the shutter button, the movement though it may be extremely slight, is shaking the camera at the exact moment you are taking the picture.
Make sure that the camera is tight to the F mount and that the F mount is secure to the microscope.
If you are initiating exposure via software, it is still possible that there is still some slight movement on your desk.
Remember, the slightest movement is magnified many, many times to the camera.
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